diff --git a/src/ol/render/webgl/Replay.js b/src/ol/render/webgl/Replay.js
index 4a55652a31..2c6282fb28 100644
--- a/src/ol/render/webgl/Replay.js
+++ b/src/ol/render/webgl/Replay.js
@@ -146,9 +146,9 @@ WebGLReplay.prototype.finish = function(context) {};
  * @param {module:ol/size~Size} size Size.
  * @param {number} pixelRatio Pixel ratio.
  * @return {module:ol/render/webgl/circlereplay/defaultshader/Locations|
-            ol/render/webgl/linestringreplay/defaultshader/Locations|
-            ol/render/webgl/polygonreplay/defaultshader/Locations|
-            ol/render/webgl/texturereplay/defaultshader/Locations} Locations.
+            module:ol/render/webgl/linestringreplay/defaultshader/Locations|
+            module:ol/render/webgl/polygonreplay/defaultshader/Locations|
+            module:ol/render/webgl/texturereplay/defaultshader/Locations} Locations.
  */
 WebGLReplay.prototype.setUpProgram = function(gl, context, size, pixelRatio) {};
 
@@ -158,9 +158,9 @@ WebGLReplay.prototype.setUpProgram = function(gl, context, size, pixelRatio) {};
  * @protected
  * @param {WebGLRenderingContext} gl gl.
  * @param {module:ol/render/webgl/circlereplay/defaultshader/Locations|
-           ol/render/webgl/linestringreplay/defaultshader/Locations|
-           ol/render/webgl/polygonreplay/defaultshader/Locations|
-           ol/render/webgl/texturereplay/defaultshader/Locations} locations Locations.
+           module:ol/render/webgl/linestringreplay/defaultshader/Locations|
+           module:ol/render/webgl/polygonreplay/defaultshader/Locations|
+           module:ol/render/webgl/texturereplay/defaultshader/Locations} locations Locations.
  */
 WebGLReplay.prototype.shutDownProgram = function(gl, locations) {};
 
diff --git a/src/ol/source/Raster.js b/src/ol/source/Raster.js
index 18252094bf..79ec0abc34 100644
--- a/src/ol/source/Raster.js
+++ b/src/ol/source/Raster.js
@@ -152,7 +152,7 @@ const RasterSource = function(options) {
 
   /**
    * @private
-   * @type {module:ol/source/RasterOperationType}
+   * @type {module:ol/source/Raster~RasterOperationType}
    */
   this.operationType_ = options.operationType !== undefined ?
     options.operationType : RasterOperationType.PIXEL;
diff --git a/src/ol/source/TileDebug.js b/src/ol/source/TileDebug.js
index 0fc40f2c9d..589d8f9288 100644
--- a/src/ol/source/TileDebug.js
+++ b/src/ol/source/TileDebug.js
@@ -116,7 +116,7 @@ inherits(TileDebug, TileSource);
 TileDebug.prototype.getTile = function(z, x, y) {
   const tileCoordKey = getKeyZXY(z, x, y);
   if (this.tileCache.containsKey(tileCoordKey)) {
-    return /** @type {!module:ol/source/LabeledTile} */ (this.tileCache.get(tileCoordKey));
+    return /** @type {!module:ol/source/TileDebug~LabeledTile} */ (this.tileCache.get(tileCoordKey));
   } else {
     const tileSize = toSize(this.tileGrid.getTileSize(z));
     const tileCoord = [z, x, y];
diff --git a/src/ol/source/TileUTFGrid.js b/src/ol/source/TileUTFGrid.js
index 566204c2c4..0e320618dc 100644
--- a/src/ol/source/TileUTFGrid.js
+++ b/src/ol/source/TileUTFGrid.js
@@ -384,7 +384,7 @@ UTFGrid.prototype.forDataAtCoordinateAndResolution = function(
   if (this.tileGrid) {
     const tileCoord = this.tileGrid.getTileCoordForCoordAndResolution(
       coordinate, resolution);
-    const tile = /** @type {!module:ol/source/CustomTile} */(this.getTile(
+    const tile = /** @type {!module:ol/source/TileUTFGrid~CustomTile} */(this.getTile(
       tileCoord[0], tileCoord[1], tileCoord[2], 1, this.getProjection()));
     tile.forDataAtCoordinate(coordinate, callback, null, opt_request);
   } else {